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Control Method of Lattice Defect Formed by Ion Irradiation Using Mask
Control Method of Lattice Defect Formed by Ion Irradiation Using Mask
2019
Yuki Nakata
Takahide Yagi
Masatsugu Sogabe
Keywords:
Ion
Lattice (order)
Semiconductor
Irradiation
Materials science
Molecular physics
control methods
Optoelectronics
lattice defects
Correction
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