Rational Design Calculation of Surface Acoustic Wave Gas Sensor

The high temperature of surface acoustic wave resonator at specific frequencies is an important challenge for electronic designers. Various modifications of the cooling in ZnO based sensitive element for the two-port surface acoustic wave sensor (SAW) design were considered. The effect of microchannel for cooling in SAW sensor characteristics was investigated by the finite element simulation method. Obtained versatile flexible multiparameter model allowed the evaluation of performance parameters. The optimal parameters for the SAW sensor design could be estimated by the proposed approach.