FEASIBILITY OF MICRO-COILS

The feasibility of micro-coils of the so-called pancake geometry is investigated. Different materials are being compared for optimum conductor choice, including electrical conductivity, specific heat, magneto-resistance and mechanical properties. The modalities of operation are presented. The feasibility of manufacturing such coils is examined. Planar coils consisting of about 100 turns with conductor widths as small as 3 pm are being fabricated. The turns will be deposited either directly onto Si or onto SiOJSi. All patterns will be defined by photolithography. The results show that the maximum stress is very high for such micro-coils. The maximum stress may be reduced by adjusting the current density.