A hollow cold cathode multipurpose ion source

Abstract This paper describes an ion source with hollow cold cathode discharge. This source is simple regarding structure and power supply. Its working temperature can reach 1700°C. Therefore it is able to produce ion beams of various elements and negative ion beams of some other elements. We developed a hollow cold cathode ion source (HCCIS) [1] in 1983. Since then the structure of the source has been improved, its function has been extended considerably and the size reduced (the weight is less than 1 kg).