Method for making high-temperature micrometre size speckle

2008 
Provided is a method for producing a high temperature micron-scale speckle, belonging to the technical field of optical measurement mechanics. The invention is technically characterized in preparing the high temperature micron-scale speckle having the advantages of simple operation, flexibility and easy implementation in the instrument environment of an electron beam lithography machine which is a mature commodity. The speckle with properties of variable density, variable depth and variable size can be produced by changing magnification, beam intensity and etching time of the electron beam optical exposure system, suitable for the study of the microscopic deformation behavior of different materials in a high-temperature environment.
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