Ultra-small single-crystal silicon cantilevers for scanning force microscopes
2004
We have fabricated ultra-small, -fast, and -sensitive single-crystal silicon cantilevers, allowing at least a factor of 10 improvement in sensitivity and a factor of 20-50 enhancement in speed. Two methods allowing a good control of lever length and a miniaturized support chip were developed. These ultra-small cantilevers have excellent mechanical properties and are suitable for use in scanning force microscopes.
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