3D FEM simulations of perforated MEMS gas dampers

3D Navier-Stokes FEM solver was used to study the damping forces due to air flow in a perforated damper in translational motion normal to surfaces. Several damper topologies with square surfaces having 16 or 64 square holes were simulated. Dimensions of micromechanical devices were used and thus a slightly rarefied gas flow was considered using slip velocity boundary conditions. Incompressible and inertialess flow with small pressure differences was assumed.