Heterodyne Interferometer for the Metrological Assurance of the Devices Measuring Physical Properties of Nanostructured Materials

Abstract Nano-hardness tester with three-coordinate laser heterodyne interferometer integrated in the commercially available industrial scanning probe is developed. It allows ensuring traceability of measurements in nanometer range to the primary standard of meter. This device may be used for the characterization of indentor's tips. Corresponding method is presented.