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Atomic Layer Deposition and Thermal Transformations of Thin Titanium–Vanadium Oxide Films
Atomic Layer Deposition and Thermal Transformations of Thin Titanium–Vanadium Oxide Films
2021
A. I. Abdulagatov
A. M. Maksumova
D. K. Palchaev
M. Kh. Rabadanov
Ilmutdin M. Abdulagatov
Keywords:
Chemistry
Thermal
Vanadium oxide
Chemical engineering
Titanium
Atomic layer deposition
Correction
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