The method of purification of trichlorosilane

The present invention discloses a method for the purification of trichlorosilane. The method comprises the step of trichlorosilane purification of the crude was passed through the column group, the step of trichlorosilane purification of the crude was passed through the column group comprising: the crude trichlorosilane was passed through the column comprises at least two heavy de de de heavy weight column group sequentially processed, the processing to obtain the weight obtained by removal of low boilers; the reprocessing stripped of low boilers is fed to give off a light column comprising a set of at least a light off the light tower sequentially de processing to obtain trichlorosilane. In this method, the first crude liquid trichlorosilane by weight of de-light removal column by column again set group, the crude liquid can be re-deprotection step after the removal of light weight step. This pre-stage continuous take off weight, silica powder impurity off-stage continuous light capable of setting a crude liquid, high boiling point and high-boiling metal chlorides chloride impurities are separated in the pre-stage process of removal weight, thereby easily cause clogging of these impurity concentration in the pre-stage de-weight column, reducing the chance of clogging and the subsequent purification column reboiler.