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Dielectric SiO 2 planarization using MnO 2 slurry
Dielectric SiO 2 planarization using MnO 2 slurry
2012
Sadahiro Kishii
Ko Nakamura
Kenzo Hanawa
Satoru Watanabe
Yoshihiro Arimoto
Syuhei Kurokawa
Toshiro Doi
Keywords:
Analytical chemistry
Dielectric
Chemical-mechanical planarization
Slurry
Materials science
Composite material
Electronic engineering
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