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Ellipsometry: Theory, methods, applications
Ellipsometry: Theory, methods, applications
1987
A. V. Rzhanov
L. A. Ilina
Keywords:
Polarization (waves)
Thin film
Fourier analysis
Surface roughness
Ellipsometry
Optoelectronics
Molecular beam epitaxy
Dielectric
Microelectronics
Materials science
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