An optical in-plane displacement measurement technique with sub-nanometer accuracy based on curve-fitting
2014
In this paper we present a new optical method for detecting in-plane displacements in microelectromechanical systems with deep sub-nanometer accuracy. The technique is based on curve fitting. We investigate the error sources that influence the measurement and show measurements to demonstrate that a position resolution of 130 pm can be obtained with a simple microscope and camera.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
9
References
4
Citations
NaN
KQI