Radiofrequency electron swarm transport in reactive gases and plasmas

This paper gives a historical review of the development of radiofrequency (RF) electron swarm from a theoretical point of view. Also the recent progress of the direct numerical procedure (DNP) for solving the Boltzmann equation will be discussed with some typical examples of the temporally modulated velocity distribution in Ar and HCl in an RF field. The significance of DNP will be demonstrated for an RF swarm in the frequency range from MHz to GHz at strong fields.