Evaluation of Ion Beam Spectra for Surface Analysis of Probes Exposed in Fusion Devices

A computer programme has been developed which allows to evaluate a large number of ion beam spectra from different samples taken for the same geometry and conditions of the analysing beam. The programme calculates the depth profiles of different elements in the target both from Rutherford backscattering and nuclear reaction analysis. The method will be discussed for the example of elastic backscattering of protons and helium ions and demonstrated by the analysis of samples exposed to a tokamak plasma.