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Acemap > Paper > 「ゲート絶縁膜／Ｓｉ界面の評価」ＳｉＯ２中の拡散に与えるＳｉ／ＳｉＯ２界面の影響

「ゲート絶縁膜／Ｓｉ界面の評価」ＳｉＯ２中の拡散に与えるＳｉ／ＳｉＯ２界面の影響

2005 
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