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Creation of Solid Immersion Lenses in Bulk Silicon Using Focused Ion Beam Backside Editing Techniques
Creation of Solid Immersion Lenses in Bulk Silicon Using Focused Ion Beam Backside Editing Techniques
2008
Philipp Scholz
U. Kerst
Christian Boit
C.C. Tsao
Ted R. Lundquist
Keywords:
Optoelectronics
Materials science
Immersion (virtual reality)
Focused ion beam
Silicon
Lens (optics)
Correction
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