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The First Principles Investigation of SiC/SiO2 Interfaces Obtained by Thermal Oxidation
The First Principles Investigation of SiC/SiO2 Interfaces Obtained by Thermal Oxidation
2014
Kenji Shiraishi
Kenta Chokawa
Katsumasa Kamiya
Shigenori Kato
Kentaro Endo
Masaaki Araidai
Keywords:
Communication
Thermal oxidation
Inorganic chemistry
Materials science
Chemical engineering
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