Method for cleaning a glass substrate

2012 
In the cleaning method of a glass substrate after polishing, the adhesion reduction of the resin BM film formed on cleaned glass substrate surface is suppressed to prevent the peeling of the resin BM layer. The glass substrate which has been polished by the polishing agent containing cerium oxide particles, washing with an acidic aqueous cleaning solution containing an organic acid and then base in the glass substrate cleaning method characterized by cleaning with an alkaline aqueous cleaning solution containing is there.
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