Controlling surface morphology by nanocrystalline/amorphous competitive self-phase separation in thin films: thickness-modulated reflectance and interference phenomena

Abstract Controlling surface morphology is a key issue for obtaining functional materials with surface-based properties. In this paper, we explore the possibility of using the self-separation of phases as a way of controlling the surface morphology features. We demonstrate using X-ray diffraction and transmission electron microscopy that a competitive self-separation of a nanocrystalline and an amorphous phases occurs in co-sputtered Zr-Mo thin films with a Mo content of 60 at%, corresponding to a composition intermediate to those necessary to form single-phased amorphous and nanocrystalline films. The dependence of the residual stress with the thickness at the biphased composition is discussed in terms of the morphology evolution and a possible mechanism for the self-separation of phases is presented. We show that the self-separation of phases as presented here is not limited to Zr-Mo alloys and can be extended to other systems. By changing the film thickness, it is possible to change the surface morphology of the films at the biphasic composition, due to the competitive growth of the nanocrystalline phase in the amorphous phase. In this way, it was possible to control the surface roughness and, because of this, tuning the film reflectance at a determined wavelength. The occurrence of an interference pattern in the reflectance spectra was discussed and associated to the presence of two different height levels at the film surface.