Variable Angle Spectroscopic Ellipsometry investigation of CVD-grown monolayer graphene

Abstract Despite intensive investigations in the UV (ultraviolet) and visible range, the research on the optical properties of graphene in the extended near and mid infrared range by means of Spectroscopic Ellipsometry (SE) remains limited yet. Herein, the optical properties of a Chemical Vapor Deposition (CVD)-grown monolayer graphene, transferred from a copper substrate onto SiO 2 /Si, were studied in the broad energy range (0.38–6.2 eV) using Variable Angle Spectroscopic Ellipsometry (VASE). The morphological and the structural properties of the samples were investigated by Micro-Raman Spectroscopy, Wavelength Dispersive X-ray (WDX) analysis, Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM). The Lorentz oscillator model proposed for the optical response of graphene fits very well the experimental data. An unintentional doping, revealed by Micro-Raman Spectroscopy and WDX, is reported.