Old Web
English
Sign In
Acemap
>
Paper
>
Nano-motion stage for high speed and precision positioning on an X-Y plane
Nano-motion stage for high speed and precision positioning on an X-Y plane
2009
Mori
Sato
Sakurada
Naganawa
Shibuya
Obinata
Keywords:
translational motion
Nano-
Precision engineering
Tracking (particle physics)
Actuator
Stage (hydrology)
Optics
Motion (geometry)
Plane (geometry)
Materials science
Correction
Source
Cite
Save
Machine Reading By IdeaReader
2
References
0
Citations
NaN
KQI
[]