High-Resolution Fourier Transform Spectroscopy: Line Widths And Line Shapes Of Spectral Lines Emitted From Helium And Mixed-Gas Inductively Coupled Plasmas

Previous studies of line widths and shapes of spectral lines emitted from the inductively coupled plasmas (ICP) have concentrated on plasmas sustained in pure argon [1]. For the present study, we used the Los Alamos Fourier transform spectrometer to estimate line widths and line shapes of Fe I lines emitted from helium and argon-nitrogen ICP discharges. The effect of gas composition and plasma operating conditions on widths and shapes of the spectral lines were examined. Line widths and line shapes of Fe lines were compared with those of argon and helium for Ar ICP and He ICP discharges. Results were used to calculate Doppler temperatures and electron number densities of the cited plasmas.