In-Sole MEMS Pressure Sensing for a LowerExtremity Exoskeleton

The control system for the Berkeley lower extremity exoskeleton (BLEEX) requires ground contact pressure information to operate safely and effectively. Commercially available in-sole sensors do not have sufficient bandwidth, accuracy and reliability for such a system. We have designed and prototyped an in-sole ground contact sensor that uses MEMS pressure transducers placed in an array of hermetically sealed cavities. This system provides a robust method to monitor ground contact pressures