Ultrathin Films of Palladium Oxide for Oxidizing Gases Detecting

Abstract For the first time ultrathin films of palladium oxide are set forth as the perspective materials for detecting oxidizing gases. PdO 1± x thin films were prepared by thermal oxidation of previously formed Pd layers. By RHEED and HRTEM investigations it has been established that homogenous polycrystalline PdO 1± x films (thickness was about 5 – 10 nm) with grain size ∼ 7 – 15 nm were formed on polished poly-Al 2 O 3 , SiO 2 /Si(100), optical quartz, and amorphous C/KCl substrates. At ozone detecting in air PdO 1± x films have shown high values of sensor response, signal stability, and reproducibility of sensor response. At fabrication of gas sensors usage of PdO 1± x ultrathin films has some advantages in comparison with other materials. Firstly, PdO 1± x films have shown high values of sensor response, signal stability, and reproducibility of sensor response. Secondly, the synthesis procedure of binary films PdO 1± x is rather simple and is compatible with planar processes of a microelectronic industry also.