Design of a 2-DOF Compliant Micropositioning Stage with Large Workspace

With the development of mechanical research and manufacturing, micromanipulation has become a hot topic. A micropositioning stage based on a compliant mechanism plays an important role in manipulation at the micro-/nano-meter scale. In this chapter, a 2-DOF compliant micropositioning stage with a large motion range and fine decoupling ability is designed. Its mechanical design is firstly presented and improved. Subsequently, its analytical model is established to analyze the static characteristics. Lastly, the simulation results with finite-element analysis (FEA) demonstrate the established model is effective and the error of amplification ratio is controlled by 5.77%.