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Metrology and Simulation of Chemical Transport in Microchannels
Metrology and Simulation of Chemical Transport in Microchannels
1998
P. M. St. John
Timothy M. Woudenberg
Charles R. Connell
Manish Deshpande
John R. Gilbert
M. Garguillo
P. Paul
J. I. Molho
Amy E. Herr
Thomas W. Kenny
M. G. Mungal
Keywords:
Materials science
Nanotechnology
Metrology
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