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Growth-rate enhancement for 4H-SiC CVD trench filling
Growth-rate enhancement for 4H-SiC CVD trench filling
2019
Shiyang Ji
Ryoji Kosugi
Kazutoshi Kojima
Kohei Adachi
Yasuyuki Kawada
Kazuhiro Mochizuki
Yoshiyuki Yonezawa
Sadafumi Yoshida
Hajime Okumura
Keywords:
Materials science
Growth rate
Composite material
Trench
Correction
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