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SiGe/Si Vertical Heterostructures: Switching the Dislocation Sign by Substrate Under-Etching
SiGe/Si Vertical Heterostructures: Switching the Dislocation Sign by Substrate Under-Etching
2018
F Rovaris
Fabio Isa
R. Gatti
A. Jung
Giovanni Isella
Francesco Montalenti
H von Kaenl
Keywords:
Substrate (chemistry)
Etching
Optoelectronics
Heterojunction
Materials science
Dislocation
Correction
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