The Factors Influence Investigation on a Tip‐induced Oxidation Process and Its Applications for Nanoscale Image Creation

The peculiarities of the local anodic oxidation (LAO) process of ultrathin amorphous titanium films by scanning probe microscope are discussed. It is shown that the tip‐induced oxidation process can be considered as electrochemical anodic oxidation. A model of the LAO kinetics is proposed. In a present work we discussing factors which could affect an oxide line width and search for best conditions to obtain minimal oxide size. The resolution about 4nm in width and 10nm step for oxide dots nanopatterning process on titanium film is achieved.