Dielectric properties of percolative BaTiO3/Ni composite film fabricated by aerosol deposition process

In this paper, the BaTiO3/Ni composite films of 10 μm were fabricated by Aerosol deposition. We investigate the dielectric behavior of BaTiO3/Ni composite films with various Ni contents. The BaTiO3/Ni composite film with Ni content of 9.1 vol% has high dielectric constant at 1 kHz (476) due to the percolation effect. This high dielectric constant was attributed to the microcapacitor structures and Maxwell–Wagner polarization. Although the BaTiO3/Ni composite film was fabricated at room temperature, it had a high dielectric constant of 8 times higher than that of raw BaTiO3 film, and showed a very low leakage current. Therefore, BaTiO3/Ni composite films fabricated by Aerosol deposition can potentially be used as embedded capacitors.