Tunable 1060nm VCSEL co-packaged with pump and SOA for OCT and LiDAR

A 1060 nm optically pumped tunable VCSEL was formed from an InGaAs/AlGaAs/GaAs half-VCSEL bonded to a MEMS movable mirror on a silicon substrate. The VCSEL was co-packaged in a 14-pin butterfly module with an 825 nm pump laser and a 1060 nm semiconductor optical amplifier. The co-packaged device exhibited shot-noise-limited sensitivity with up to 50 mW output power and 75 nm tunability. Ophthalmic OCT, especially whole-eye imaging and ocular biometry, is considered the primary application of this device. However, we have also investigated LiDAR to greater than 10 meter ranges with non-mechanical beam steering through angular diffraction from a grating. A new generation of photonic integrated circuit LiDARs work this way and we have investigated the depth resolution limitations due to time dispersion from the grating. Distributed fiber temperature sensing was also demonstrated.