Superconducting and semiconducting YBCO thin film bolometer investigations for future THz imaging arrays

There is a strong need for wideband and sensitive THz receivers for radio astronomy and remote sensing applications, for which superconducting Hot Electron Bolometer (HEB) mixers are very competitive. Besides, new THz applications have arisen because of interesting interaction with various media, for which room temperature detectors are highly attractive. We have used YBa2Cu3O7-d (YBCO) oxides to fabricate bolometers, either of high-Tc superconducting HEB type (high oxygen content, d 0.5). Firstly, we fabricated HEBs made from superconducting YBCO ultrathin films (15 to 40 nm thick) etched to form submicrometer constrictions. In order to investigate the feasibility of highly sensitive HEB linear arrays for passive THz imaging applications, extensive technological runs were performed to prevent ageing effects on both the pixel electrical and optical characteristics. Secondly, we designed YBCO semiconducting bolometric pixels for room temperature operation. Due to the reduced sensitivity and bandwidth with respect to superconducting HEBs, we considered the feasibility of 2D arrays for active THz imaging. As a first experimental step, pixel responsivity and thermal crosstalk between pixels were studied in the 1 Hz to 100 kHz modulation frequency range, so to evaluate the adequate frame refreshing rate.