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Plasma-enhanced atomic layer deposition of Co using Co(MeCp)2 precursor
Plasma-enhanced atomic layer deposition of Co using Co(MeCp)2 precursor
2013
Jusang
Park
Han Bo Ram
Lee
doyoung
Kim
Jae Hong
Yoon
Clement
Lansalot
Julien
Gatineau
Henri
Chevrel
Hyungjun
Keywords:
Materials science
Plasma
Atomic layer deposition
Analytical chemistry
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