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Low Temperature Deposition of AlN Films by an Alternate Supply of Trimethyl Aluminum and Ammonia.
Low Temperature Deposition of AlN Films by an Alternate Supply of Trimethyl Aluminum and Ammonia.
2010
D. Riihelae
Mikko Ritala
Raija Matero
Markku Leskelae
Janne J. Jokinen
P. Haussalo
Keywords:
Aluminium
Deposition (law)
Chemistry
Ammonia
Inorganic chemistry
low temperature deposition
Correction
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