Structure Analysis and Simulation of Chemical Sensor for Food Safety Detection

The structure of chemical sensor has great influence on the performance of the sensor. This article studies on the relationship between the structure parameter and the mechanical characteristics of the sensor. The original resonance frequency and modes shape of the structure are obtained by the finite element analysis. Then a series of simulation comparison analyses are carried out to verify that the performance of modified sensor structure for food safety detection is improved greatly, which provides a good guide for the design of MEMS chemical sensor further.