Method for preparing n-type An1-XMgXO crystal film
2003
A process for preparing n-type Zn1-xMgxO crystal film by pulse laser deposition method includes providing high-purity ZnO, MgO and n-type dopant powder, proportional mixing, grinding, adding organic adhesive, die pressing, sintering to obtain the n-type doped Zn1-xMgxO ceramic target, and using laser to irradiate the target in high-purity oxygen to grow the n-type Zn1-xMgxO crystal film on clean substrate.
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