Apparatus and method for determining the structure of a reflective surface of an object

Apparatus for determining the structure of a reflective surface of an object (O), comprising: - a pattern surface (4, 401, 402); - one or more imagers (301, 302, 7), which, on the pattern surface (4, 401, 402) pattern can be generated, said image points on the sample surface (4, 401, 402) each have a Musterkoordinate one of the pattern area (4 , 401, 402) associated with the coordinate system are identified; - a first measuring device (5, 6) for optical measurement of the pattern area (4), with on the optical measurement of the spatial coordinates of pixels on the sample surface (4) are based can be determined in a global coordinate system, whereby a first assignment of pattern coordinates to spatial coordinates of the image points is created; - a second measuring device for optically measuring the specular surface of an object at pattern reflection with means on the sample surface (4, 401, 402) generate (O) based a number of patterns with one or more image sensors (2) to the on...