Properties of compositionally graded (Pb,Sr)TiO3 thin films for tunable microwave device application

Multilayered (Pb 1-x Sr x )TiO 3 thin films consisted of uniform PST(x) and sandwich-like compositionally graded PST80-60-80 were fabricated on Pt/Ti/SiO 2 /Si substrates by coating the solutions with different Sr contents(60

Keywords:

• Annealing (metallurgy)
• Dielectric
• Dielectric loss
• Figure of merit
• Materials science
• Thin film
• Composite material
• Perovskite (structure)
• Thermal stability
• Permittivity

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