Reference material for transmission electron microscope calibration
2011
We propose a new type of reference material as a magnification standard of a transmission electron microscope (TEM) and a scanning transmission electron microscope. The reference material represents a thin cross-section of a silicon relief structure with certified sizes of its elements. It is fabricated using ion milling. Such reference material can be used for high microscope magnifications (by direct observation of the lattice), as well as for moderate magnifications (around 30 000 times).
Keywords:
- 4Pi microscope
- Scanning transmission electron microscopy
- Conventional transmission electron microscope
- Scanning Hall probe microscope
- Optics
- Low-voltage electron microscope
- Environmental scanning electron microscope
- Electron beam-induced deposition
- Physics
- Electron microscope
- Microscope
- High-resolution transmission electron microscopy
- Ion milling machine
- Correction
- Source
- Cite
- Save
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