Ferroelectricity of HfZrO 2 in Energy Landscape With Surface Potential Gain for Low-Power Steep-Slope Transistors
2015
The corresponding energy landscape and surface potential are deduced from the experimental ferroelectricity of HfZrO 2 (HZO) for low-power steep-slope transistor applications. The anti-ferroelectric (AFE) in annealed 600°C HZO extracted electrostatic potential gain from the measured polarization hysteresis loop and calculated subthreshold swing 33 mV/dec over six decades of $I_{\rm DS} $ . A feasible concept of coupling the AFE HZO is experimentally established with the validity of negative capacitance and beneficial for steep-slope FET development in future generation.
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