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Local Strain Measurement by Geometrical Phase Analysis in the Transmission Electron Microscope Applied to Strain-Engineered CMOS Devices
2008
Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008
Keywords:
- Microscopy and Microanalysis
- Analytical chemistry
- CMOS
- Conventional transmission electron microscope
- Scanning transmission electron microscopy
- High-resolution transmission electron microscopy
- Energy filtered transmission electron microscopy
- Electron tomography
- Transmission electron microscopy
- Materials science
- Optics
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