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Anisotropic Plasma Etching of Sputtered Zinc Oxide
Anisotropic Plasma Etching of Sputtered Zinc Oxide
1990
G. D. Swanson
Takashi Tamagawa
Dennis L. Polla
Keywords:
Analytical chemistry
Thin film
Zinc
Dry etching
Scanning electron microscope
Reactive-ion etching
Isotropic etching
Inorganic chemistry
Inorganic compound
Plasma etching
Chemistry
Etching
Correction
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