プラズマ原子層堆積法で300°C低温形成した強誘電体Hf x Zr 1-x O 2 薄膜の疲労特性

2020 
    • Correction
    • Source
    • Cite
    • Save
    • Machine Reading By IdeaReader
    0
    References
    0
    Citations
    NaN
    KQI
    []