Electrically conductive diamond-like layer
2008
The invention relates to a method for coating surfaces with an electrically conductive diamond-like layer by means of plasma enhanced chemical vapor deposition. According to the invention the gaseous atmosphere from which the coating is deposited, a gas containing carbon and ≧ 0.01% by volume to ≦ 50 volume comprises% oxygen, ≧ 0.01% by volume to ≦ 70% by volume nitrogen and ≧ 0.01 % by volume to ≦ 10% by volume argon, the sum of the above components ≦ being 100% by volume. The inventive method provides a diamond-like layer is available, which has sufficient electrical conductivity.
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