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Microstructure of Poly-Si Obtained by Rapid Thermal Annealing of Amorphous Silicon Films
Microstructure of Poly-Si Obtained by Rapid Thermal Annealing of Amorphous Silicon Films
1994
J. Stoemenos
N. A. Economou
Lazhar Haji
M. Bonnel
N. Duhamel
B. Loisel
Keywords:
Annealing (metallurgy)
Microstructure
Amorphous silicon
Composite material
Metallurgy
Materials science
Rapid thermal processing
rapid thermal annealing
solid phase crystallization
Correction
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