Both sides coated surface stress sensor
2013
And detecting thin film structure partially fixed to two ends of at least opposite to the mounting portion, said a receptor layer coated on both sides of the detection film structure portion, 2 facing the fixed of the detection film structure portion one of at least one end, or at least one vicinity of the two opposite ends of the fixed of the mounting portion, the element is provided for detecting the stress, coated on both sides of the detection film structure portion based on stress applied to the receptor layer, characterized in that to obtain a detection output from said element. Thus, it is possible to provide a double-sided coated surface stress sensor capable of covering both sides of the detection film structure portion at the receptor layer, and obtain a sufficiently large detection output.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI