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Study of Cathode Spots and Gas Temperature in KrF Excimer Excited Discharges.
Study of Cathode Spots and Gas Temperature in KrF Excimer Excited Discharges.
1997
Yasushi Minamitani
Yoshio Saitoh
Yukio Sato
Keywords:
Spots
Excimer
Analytical chemistry
Chemistry
Cathode
Excited state
cathode spots
Atomic physics
Correction
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