Effect of the deposition parameters on the properties of the two-layer surface coatings obtained using magnetron sputtering

2001 
Abstract This paper presents the effect of the deposition parameters on the properties of the Ti+TiN, Ti+Ti(C x N x −1 ), and Ti+TiC two-layer surface coatings obtained using magnetron sputtering in a vacuum furnace with a controlled temperature on a sintered ASP 30 high-speed matrix. Results of the investigated coatings’ tests are presented, depending on the working atmosphere, distance from the magnetron shield, and vacuum furnace temperature. Their effect on the structural and mechanical properties of the coatings has been evaluated.
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