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Conformable CVD of SiO2 into Deep Trench Using the Digital Method
Conformable CVD of SiO2 into Deep Trench Using the Digital Method
1990
Hiroyuki Sakaue
Masayuki Nakano
T. Ichihara
Y. Horiike
Keywords:
Composite material
Trench
Geology
Conformable matrix
deep trench
Petrology
Correction
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